CHEMI-LUMINESCENT REACTION OF SIF2 WITH FLUORINE AND THE ETCHING OF SILICON BY ATOMIC AND MOLECULAR FLUORINE

被引：25

作者：

MUCHA, JA

FLAMM, DL

DONNELLY, VM

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1982年 / 53卷 / 06期

关键词：

D O I：

10.1063/1.331204

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4553 / 4554

页数：2

共 17 条

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[9] ULTRAVIOLET ABSORPTION SPECTRUM OF SIF2 [J].

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