MECHANISM OF THE SILANE DECOMPOSITION .1. SILANE LOSS KINETICS AND RATE INHIBITION BY HYDROGEN .2. MODELING OF THE SILANE DECOMPOSITION (ALL STAGES OF REACTION)

被引：115

作者：

WHITE, RT

ESPINORIOS, RL

ROGERS, DS

RING, MA

ONEAL, HE

机构：

来源：

INTERNATIONAL JOURNAL OF CHEMICAL KINETICS | 1985年 / 17卷 / 10期

关键词：

D O I：

10.1002/kin.550171003

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：1029 / 1065

页数：37

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