DETERMINATION OF TEMPERATURE AND PARTIAL-PRESSURE BY RAMAN-SCATTERING INSIDE A CVD REACTOR

被引：5

作者：

BOUIX, J

BERTHET, MP

BOUBEHIRA, M

DAZORD, J

VINCENT, H

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1982年 / 129卷 / 10期

关键词：

D O I：

10.1149/1.2123507

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：2338 / 2343

页数：6

共 20 条

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