EXPERIMENTAL INVESTIGATION OF GAS-PHASE IN A CHEMICAL VAPOR-DEPOSITION REACTION - APPLICATION TO SILANE-AMMONIA REACTION LEADING TO SILICON-NITRIDE DEPOSITS

被引：20

作者：

COCHET, G

MELLOTTEE, H

DELBOURGO, R

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1978年 / 125卷 / 03期

关键词：

D O I：

10.1149/1.2131479

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：487 / 492

页数：6

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[10] ROLE OF HOMOGENEOUS REACTIONS IN CHEMICAL VAPOR DEPOSITION [J].

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