PREPARATION AND CHARACTERISTICS OF A-SI-CL-H FILMS

被引:10
作者
CHEN, ZM
LIAO, XB
KONG, GL
机构
来源
SOLAR ENERGY MATERIALS | 1982年 / 7卷 / 02期
关键词
D O I
10.1016/0165-1633(82)90080-6
中图分类号
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号
0807 ; 0820 ;
摘要
引用
收藏
页码:149 / 152
页数:4
相关论文
共 9 条
[1]  
DAI GC, 1980, J SHANDONG U, P46
[2]   NEGATIVE-U STATES IN GAP IN HYDROGENATED AMORPHOUS SILICON [J].
FISCH, R ;
LICCIARDELLO, DC .
PHYSICAL REVIEW LETTERS, 1978, 41 (13) :889-891
[3]  
KRUHLER WW, 1980, J NONCRYSTALLINE SOL, V35, P333
[4]  
LEY L, 1980, 15TH INT C PHYS SEM, P1241
[5]   CHEMICAL EFFECTS ON THE FREQUENCIES OF SI-H VIBRATIONS IN AMORPHOUS SOLIDS [J].
LUCOVSKY, G .
SOLID STATE COMMUNICATIONS, 1979, 29 (08) :571-576
[6]   AN AMORPHOUS-SILICON FILM USABLE AT HIGH-TEMPERATURE - ANNEALING PROPERTIES OF A NEW FLUORINATED AMORPHOUS-SILICON [J].
MATSUMURA, H ;
NAKAGOME, Y ;
FURUKAWA, S .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1980, 19 :111-114
[7]  
NAKAMOTO K, 1963, INFRARED SPECTRA INO, P106
[8]   NEW AMORPHOUS SILICON-BASED ALLOY FOR ELECTRONIC APPLICATIONS [J].
OVSHINSKY, SR ;
MADAN, A .
NATURE, 1978, 276 (5687) :482-484
[9]   INFRARED AND FAR-INFRARED ABSORPTION OF B-DOPED AND P-DOPED AMORPHOUS SI [J].
SHEN, SC ;
CARDONA, M .
PHYSICAL REVIEW B, 1981, 23 (10) :5322-5328