THIN-FILM BULK ACOUSTIC RESONATORS EMPLOYING ZNO PYREX-GLASS COMPOSITE DIAPHRAGM STRUCTURE

被引：4

作者：

MAKISHIMA, Y

HASHIMOTO, KY

YAMAGUCHI, M

机构：

[1] Department of Electrical and Electronics Engineering, Chiba University, Inage-ku, Chiba

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1994年 / 33卷 / 5B期

关键词：

THIN-FILM BULK ACOUSTIC RESONATOR; ZNO; PYREX GLASS; COMPOSITE DIAPHRAGM;

D O I：

10.1143/JJAP.33.2998

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

This paper discusses the application of ZnO/Pyrex-glass composite diaphragm structure to thin-film bulk acoustic resonators (FBARs). Analysis of ZnO/Pyrex-glass composite diaphragm structure showed for thickness-longitudinal vibration that zero temperature, coefficient of frequency with relatively large electromechanical coupling constant of about 20% is realised for the second- and third-order resonances as well as for the fundamental resonance. An FBAR employing the ZnO/Pyrex-glass composite diaphragm structure was fabricated, and Q values of 970 and 858 were obtained, respectively. for the fundamental and second-order resonances at 298.7 MHz and 497.5 MHz.

引用

页码：2998 / 3000

页数：3

共 9 条

[1]

GRUDKOWSKI GW, 1980, APPL PHYS LETT, V37, P993

[2] ACOUSTIC BULK WAVE COMPOSITE RESONATORS [J].