ZNO-SIO2-DIAPHRAGM COMPOSITE RESONATOR ON A SILICON-WAFER

被引：64

作者：

NAKAMURA, K

SASAKI, H

SHIMIZU, H

机构：

来源：

ELECTRONICS LETTERS | 1981年 / 17卷 / 14期

关键词：

D O I：

10.1049/el:19810355

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：507 / 509

页数：3

共 11 条

[1] ZNO FILMS FOR SURFACE ACOUSTOOPTIC DEVICES ON NONPIEZOELECTRIC SUBSTRATES [J].

CHUBACHI, N .

PROCEEDINGS OF THE IEEE, 1976, 64 (05) :772-774

[2] A WATER-AMINE-COMPLEXING AGENT SYSTEM FOR ETCHING SILICON [J].

FINNE, RM ;

KLEIN, DL .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1967, 114 (09) :965-&

[3] FUNDAMENTAL-MODE VHF-UHF MINIATURE ACOUSTIC RESONATORS AND FILTERS ON SILICON [J].

GRUDKOWSKI, TW ;

BLACK, JF ;

REEDER, TM ;

CULLEN, DE ;

WAGNER, RA .

APPLIED PHYSICS LETTERS, 1980, 37 (11) :993-995

[4]

Lakin K. M., 1980, P IEEE ULTR S, P834

[5] MEASUREMENT OF ELASTIC CONSTANTS AT LOW TEMPERATURES BY MEANS OF ULTRASONIC WAVES - DATA FOR SILICON AND GERMANIUM SINGLE CRYSTALS, AND FOR FUSED SILICA [J].

MCSKIMIN, HJ .

JOURNAL OF APPLIED PHYSICS, 1953, 24 (08) :988-997

[6]

NAKAMURA K, 1980, P S ULTRASONIC ELECT, P63

[7]

NAKAMURA K, UNPUBLISHED

[8]

NAKAMURA K, 1980, AUT P M AC SOC JAP, P127

[9]

ONO S, 1977, WAVE ELECTRON, V3, P35

[10] A THIN-FILM CDS-QUARTZ COMPOSITE RESONATOR [J].

SLIKER, TR ;

ROBERTS, DA .

JOURNAL OF APPLIED PHYSICS, 1967, 38 (05) :2350-+

← 1 2 →