EFFECT OF OXIDE IMPURITIES ON NITRIDATION OF HIGH-PURITY SILICON

被引：19

作者：

GUTHRIE, RB ^{[1
]}

RILEY, FL ^{[1
]}

机构：

[1] UNIV LEEDS, HOULDSWORTH SCH APPL SCI, DEPT CERAMICS, LEEDS, ENGLAND

来源：

关键词：

D O I：

10.1007/BF00551855

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1363 / 1365

页数：3

共 15 条

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[5] HAYES D, 1965, SCIENCE CERAMICS, V2, P331
[6] CERAMICS BASED ON SI-AL-O-N AND RELATED SYSTEMS
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[7] LABBE JC, 1971, CR ACAD SCI C CHIM, V273, P1750
[8] EFFECT OF OXYGEN IMPURITIES ON NITRIDATION OF HIGH-PURITY SILICON
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[J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1973, 56 (03) : 171 - 172
[9] ROBERTS EW, PRIVATE COMMUNICATIO
[10] IMPURITY DEPOSITS ON ALUMINA CRYSTALS
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