HIGH ELECTRON-MOBILITY SILICON FILMS GROWN ON SAPPHIRE AT HIGH GROWTH-RATE

被引:10
作者
IMAMURA, Y [1 ]
DAIDO, K [1 ]
MIMEGISHI, K [1 ]
NAKANISHI, H [1 ]
机构
[1] NIPPON TELEGRAPH & TEL PUBL CORP,MUSASHINO ELECT COMMUN LAB,MUSASHINO,TOKYO 180,JAPAN
关键词
D O I
10.7567/JJAPS.16S1.547
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:547 / 550
页数:4
相关论文
共 6 条
[1]  
CULLEN CW, 1971, J CRYSTAL GROWTH, V9, P107
[2]   EFFECT OF RAPID EARLY GROWTH ON PHYSICAL AND ELECTRICAL PROPERTIES OF HETEROEPITAXIAL SILICON [J].
CULLEN, GW ;
CORBOY, JF ;
SMITH, RT .
JOURNAL OF CRYSTAL GROWTH, 1975, 31 (DEC) :274-283
[3]   CARRIER TRANSPORT IN THIN SILICON FILMS [J].
DUMIN, DJ ;
ROBINSON, PH .
JOURNAL OF APPLIED PHYSICS, 1968, 39 (06) :2759-&
[4]   ANALYSIS OF CARRIER TRANSPORT IN VACUUM-EVAPORATED EPITAXIAL FILMS OF SILICON ON SPINEL [J].
HASEGAWA, S ;
KAMINAKA, N ;
NAKAMURA, T ;
ITOH, T .
JOURNAL OF APPLIED PHYSICS, 1969, 40 (11) :4620-&
[5]  
KANE PF, 1971, CHARACTERIZATION SEM, P183
[6]  
MATARE HF, 1971, DEFECTS ELECTRONICS, P152