MODELING OF ELECTRON-CYCLOTRON-RESONANCE DISCHARGES

被引：18

作者：

MEYYAPPAN, M

GOVINDAN, TR

机构：

[1] Scientific Research Associates, Inc., Glastonbury

来源：

IEEE TRANSACTIONS ON PLASMA SCIENCE | 1995年 / 23卷 / 04期

关键词：

D O I：

10.1109/27.467983

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

A simple model to predict the spatially-averaged plasma characteristics of electron cyclotron resonance (ECR) reactors is presented. The model consists of global conservation equations for species concentration, electron density and energy. A gas energy balance is used to predict the neutral temperature self-consistently. The model is demonstrated for an ECR argon discharge. The predicted behavior of the discharge-as a function of system variables agrees well with experimental observations.

引用

页码：623 / 627

页数：5

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