SILANE PYROLYSIS

被引：78

作者：

ROBERTSON, R ^{[1
]}

HILS, D ^{[1
]}

GALLAGHER, A ^{[1
]}

机构：

[1] NBS,DIV QUANTUM PHYS,BOULDER,CO 80309

来源：

CHEMICAL PHYSICS LETTERS | 1984年 / 103卷 / 05期

关键词：

D O I：

10.1016/0009-2614(84)80328-0

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：397 / 404

页数：8

共 18 条

[1] VERY LOW-PRESSURE PYROLYSIS .I. KINETIC STUDIES OF HOMOGENEOUS REACTIONS AT MOLECULAR LEVEL [J].

BENSON, SW ;

SPOKES, GN .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1967, 89 (11) :2525-&

[2] MECHANISM OF THE PYROLYSIS OF C2HCL5, MOLECULAR AND RADICAL STEPS [J].

BENSON, SW ;

WEISSMAN, M .

INTERNATIONAL JOURNAL OF CHEMICAL KINETICS, 1982, 14 (12) :1287-1304

[3] KINETICS OF THE DEPOSITION OF SILICON BY SILANE PYROLYSIS AT LOW-TEMPERATURES AND ATMOSPHERIC-PRESSURE [J].

BRYANT, WA .

THIN SOLID FILMS, 1979, 60 (01) :19-25

[4] SIMULTANEOUS MEASUREMENT OF THE RATE OF FORMATION OF CARBON AND OF HYDROCARBON PRODUCTS IN THE PYROLYSIS OF METHANE [J].

CHEN, CJ ;

BACK, MH .

CARBON, 1979, 17 (02) :175-180

[5] RATE-DETERMINING REACTIONS AND SURFACE SPECIES IN CVD OF SILICON .3. THE SIH4-H2-N2 SYSTEM [J].

CLAASSEN, WAP ;

BLOEM, J .

JOURNAL OF CRYSTAL GROWTH, 1981, 51 (03) :443-452

[6] KINETICS OF SILICON DEPOSITION ON SILICON BY PYROLYSIS OF SILANE - MASS-SPECTROMETRIC INVESTIGATION BY MOLECULAR-BEAM SAMPLING [J].

FARROW, RFC .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1974, 121 (07) :899-907

[7] The thermal decomposition of silane [J].

Hogness, TR ;

Wilson, TL ;

Johnson, WC .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1936, 58 :108-112

[8] PYROLYSIS OF MONOMETHYSILANE AND DIMETHYLSILANE - ROLE OF MOLECULAR AND RADICAL PROCESSES [J].

NEUDORFL, PS ;

STRAUSZ, OP .

JOURNAL OF PHYSICAL CHEMISTRY, 1978, 82 (02) :241-242

[9] KINETICS AND MECHANISM OF THE SILANE DECOMPOSITION [J].

NEWMAN, CG ;

ONEAL, HE ;

RING, MA ;

LESKA, F ;

SHIPLEY, N .

INTERNATIONAL JOURNAL OF CHEMICAL KINETICS, 1979, 11 (11) :1167-1182

[10] PYROLYSIS OF MONOSILANE [J].

PURNELL, JH ;

WALSH, R .

PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1966, 293 (1435) :543-&

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