GAS-PHASE EPITAXY OF TITANIUM CARBIDE, TITANIUM NITRIDE AND TITANIUM CARBONITRIDE

被引：14

作者：

NICKL, JJ ^{[1
]}

SCHWEITZER, K ^{[1
]}

HAHLWEG, A ^{[1
]}

机构：

[1] LUDWIG MAXIMILIANS UNIV MUNCHEN,INST ANORG CHEM,FEST KORPER CHEM FORSCH LAB,MUNCHEN,BUNDES REPUBLIK

来源：

JOURNAL OF THE LESS-COMMON METALS | 1977年 / 51卷 / 02期

关键词：

D O I：

10.1016/0022-5088(77)90085-6

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：235 / 249

页数：15

共 20 条

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[J]. JOURNAL OF CRYSTAL GROWTH, 1975, 29 (01) : 55 - 60
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[J]. JOURNAL OF CRYSTAL GROWTH, 1976, 32 (02) : 141 - 148
[8] MUNSTER A, 1953, Z ELEKTROCHEM, V57, P571
[9] MUNSTER A, 1953, Z ELEKTROCHEM, V57, P558
[10] MORPHOLOGY OF GAS-PHASE DEPOSITED SYSTEM TITANIUM CARBIDE-GRAPHITE
NICKL, JJ
VESPER, R
[J]. JOURNAL OF THE LESS-COMMON METALS, 1971, 25 (03): : 275 - &