A POLYIMIDE-BASED CAPACITIVE HUMIDITY SENSOR

被引：123

作者：

SCHUBERT, PJ ^{[1
]}

NEVIN, JH ^{[1
]}

机构：

[1] UNIV CINCINNATI,SOLID STATE ELECTR LAB,CINCINNATI,OH 45221

来源：

关键词：

D O I：

10.1109/T-ED.1985.22104

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1220 / 1223

页数：4

共 12 条

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[2] POLYMER-BASED CAPACITIVE HUMIDITY SENSOR - CHARACTERISTICS AND EXPERIMENTAL RESULTS
DELAPIERRE, G
GRANGE, H
CHAMBAZ, B
DESTANNES, L
[J]. SENSORS AND ACTUATORS, 1983, 4 (01): : 97 - 104
[3] DENTON DD, 1983, 1983 EL MAT C
[4] Dubinin M. M., 1972, ADSORPTION DESORPTIO, P3
[5] DUBININ MM, 1971, ADV CHEM SERIES, V102
[6] HERNDON TO, 1983, MAY EL SOC M
[7] KISDNASSAMY S, 1984, ELECTRON LETT, V20, P281
[8] McCabe W.L., 1976, UNIT OPERATIONS CHEM
[9] WATER PERMEATION OF POLYMER-FILMS .1. POLYIMIDE
SACHER, E
SUSKO, JR
[J]. JOURNAL OF APPLIED POLYMER SCIENCE, 1979, 23 (08) : 2355 - 2364
[10] WATER PERMEATION OF POLYMER-FILMS .3. HIGH-TEMPERATURE POLYIMIDES
SACHER, E
SUSKO, JR
[J]. JOURNAL OF APPLIED POLYMER SCIENCE, 1981, 26 (02) : 679 - 686