FILM FABRICATION OF SOLID-SOLUTION OF THE BIFEO3-BATIO3 SYSTEM BY RF-REACTIVE SPUTTERING

被引：11

作者：

FUJII, T

SHIMIZU, S

KAJIMA, A

MIYAMA, T

机构：

[1] Toyohashi Univ of Technology, Toyohashi, Jpn, Toyohashi Univ of Technology, Toyohashi, Jpn

来源：

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 1986年 / 54-7卷

关键词：

RF-REACTIVE SPUTTERING;

D O I：

10.1016/0304-8853(86)90829-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Thin films of the BiFeO//3-BaTiO//3 solid solution system were fabricated by rf-reactive sputtering from targets composed of a mixed powder of Fe//2O//3, Bi//2O//3 and BaTiO//3. The films having the perovskite structure were obtained when the substrate temperature was raised above 320 degree C. Magnetic and electrical properties of the films are presented.

引用

页码：1303 / 1304

页数：2