INSITU SPECTROCHEMICAL ANALYSIS OF SOLID-SURFACES BY ION-BEAM SPUTTERING

被引：58

作者：

TOLK, NH ^{[1
]}

TSONG, IST ^{[1
]}

WHITE, CW ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

关键词：

D O I：

10.1021/ac50009a001

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：A16 / &

共 24 条

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