PRODUCING EXTENDED AREA DEPOSITS OF UNIFORM THICKNESS BY A NEW CHEMICAL VAPOR-DEPOSITION TECHNIQUE

被引:17
作者
BRYANT, WA [1 ]
机构
[1] WESTINGHOUSE ADV ENERGY SYST DIV,PITTSBURGH,PA 15236
关键词
D O I
10.1016/0022-0248(76)90181-0
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
引用
收藏
页码:257 / 261
页数:5
相关论文
共 14 条
  • [1] FACTORS AFFECTING ADHERENCE OF CHEMICALLY VAPOR-DEPOSITED COATINGS
    BRYANT, WA
    MEIER, GH
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (04): : 719 - 724
  • [2] BRYANT WA, 1971, 2ND P INT C CHEM VAP, P409
  • [3] BRYANT WA, 1971, THESIS U PITTSBURGH
  • [4] BRYANT WA, 1975, THESIS U PITTSBURGH
  • [5] FORCED AND NATURAL CONVECTIVE MASS TRANSFER IN MULTICOMPONENT GASEOUS MIXTURES
    CARLTON, HE
    OXLEY, JH
    [J]. AICHE JOURNAL, 1967, 13 (03) : 571 - &
  • [6] A PRELIMINARY STUDY OF VAPOR DEPOSITION OF RHENIUM AND RHENIUM-TUNGSTEN
    DONALDSON, JG
    HOERTEL, FW
    COCHRAN, AA
    [J]. JOURNAL OF THE LESS-COMMON METALS, 1968, 14 (01): : 93 - +
  • [7] FAIRCHILD CI, 1967, P C CHEM VAPOR DEPOS, P149
  • [8] HOLMAN WR, 1967, P C CHEM VAPOR DEPOS, P127
  • [9] HUEGEL FJ, 1971, 2ND P INT C CHEM VAP, P171
  • [10] PERTWEE KSG, 1964, Patent No. 3127641