共 8 条
- [4] MICROSTRUCTURE OF PLASMA-DEPOSITED A-SI-H FILMS [J]. APPLIED PHYSICS LETTERS, 1979, 35 (03) : 244 - 246
- [5] EPITAXIAL GROWTH WITH LIGHT IRRADIATION [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1968, 7 (11) : 1332 - +
- [6] SILICON THIN-FILM FORMATION BY DIRECT PHOTOCHEMICAL DECOMPOSITION OF DISILANE [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1983, 22 (01): : L46 - L48
- [7] PETERS JW, 1981, P INT C IEEE IEDM, P240