FABRICATION OF THIN PERIODIC STRUCTURES IN PHOTORESIST - MODEL

被引：41

作者：

AUSTIN, S ^{[1
]}

STONE, FT ^{[1
]}

机构：

[1] POLYTECH INST NEW YORK,DEPT ELECT ENGN & ELECTROPHYS,BROOKLYN,NY 11201

来源：

APPLIED OPTICS | 1976年 / 15卷 / 04期

关键词：

D O I：

10.1364/AO.15.001071

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：1071 / 1074

页数：4

共 15 条

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CASTLEDI.JG .

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[3] GRATING COUPLER FOR EFFICIENT EXCITATION OF OPTICAL GUIDED WAVES IN THIN FILMS [J].

DAKSS, ML ;

KUHN, L ;

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SCOTT, BA .

APPLIED PHYSICS LETTERS, 1970, 16 (12) :523-+

[4]

Dalgoutte D. G., 1973, Optics Communications, V8, P124, DOI 10.1016/0030-4018(73)90152-1

[5] GRATING FILTERS FOR THIN-FILM OPTICAL-WAVEGUIDES [J].

FLANDERS, DC ;

KOGELNIK, H ;

SCHMIDT, RV ;

SHANK, CV .

APPLIED PHYSICS LETTERS, 1974, 24 (04) :194-196

[6]

GARVIN HL, 1973, APPL OPTICS, V12, P455

[7] STIMULATED EMISSION IN A PERIODIC STRUCTURE [J].

KOGELNIK, H ;

SHANK, CV .

APPLIED PHYSICS LETTERS, 1971, 18 (04) :152-&

[8]

Kogelnik H., 1970, Bell System Technical Journal, V49, P1602

[9] ANALYSIS OF PERIODIC THIN-FILM STRUCTURES WITH RECTANGULAR PROFILES [J].

PENG, ST ;

BERTONI, HL ;

TAMIR, T .

OPTICS COMMUNICATIONS, 1974, 10 (01) :91-94

[10]

Pennington K. S., 1971, Optics Communications, V3, P357, DOI 10.1016/0030-4018(71)90108-8

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