REDUCTION OF OPTICAL SCATTER IN COATED METAL-SURFACES

被引:2
作者
ALJUMAILY, GA
WILSON, SR
MCNALLY, JJ
JUNGLING, KC
MCNEIL, JR
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 03期
关键词
D O I
10.1116/1.573900
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:439 / 440
页数:2
相关论文
共 3 条
[1]   EFFECT OF ION ASSISTED DEPOSITION ON OPTICAL SCATTER AND SURFACE MICROSTRUCTURE OF THIN-FILMS [J].
ALJUMAILY, GA ;
MCNALLY, JJ ;
MCNEIL, JR ;
HERRMANN, WC .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (03) :651-655
[2]  
ALJUMAILY GA, UNPUB
[3]   CROSS-SECTIONAL STRUCTURE OF BI FILMS AND ITS PHENOMENOLOGICAL ANALYSIS [J].
NAMBA, Y ;
MORI, T .
JOURNAL OF APPLIED PHYSICS, 1975, 46 (03) :1159-1164