PHOTOCHEMICALLY GENERATED GOLD CATALYST FOR SELECTIVE ELECTROLESS PLATING OF COPPER

被引：16

作者：

BAUM, TH

机构：

[1] IBM Almaden Research Center, San Jose, California

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1990年 / 137卷 / 01期

关键词：

Electroless Plating;

D O I：

10.1149/1.2086377

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

The creation of surface-selective copper patterns was explored via the photochemical decomposition of dimethyl (1,3-diphenyl-l,3-propanedionato) gold. UV irradiation of a substrate treated with the gold complex results in the formation of elemental gold, which in turn catalyzes copper metal plating from an electroless bath. Thus, a selective copper pattern can be formed in a simplified process as defined by patterned UV irradiation. The variables which are important to the process are discussed including the UV dose, wavelength, and the surface concentration of gold complex. © 1990, The Electrochemical Society, Inc. All rights reserved.

引用

页码：252 / 255

页数：4