METAL VAPOR VACUUM-ARC ION-SOURCE

被引：159

作者：

BROWN, IG

GALVIN, JE

GAVIN, BF

MACGILL, RA

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1986年 / 57卷 / 06期

关键词：

D O I：

10.1063/1.1138660

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：1069 / 1084

页数：16

共 85 条

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