ION-BOMBARDMENT AND TITANIUM FILM GROWTH ON POLYIMIDE

被引:29
作者
BODO, P
SUNDGREN, JE
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 04期
关键词
D O I
10.1116/1.575562
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
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页码:2396 / 2402
页数:7
相关论文
共 22 条
[1]   PHOTOEMISSION SPECTROSCOPY STUDY OF ALUMINUM-POLYIMIDE INTERFACE [J].
BARTHA, JW ;
HAHN, PO ;
LEGOUES, F ;
HO, PS .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (03) :1390-1393
[2]   ADHESION OF EVAPORATED TITANIUM FILMS TO ION-BOMBARDED POLYETHYLENE [J].
BODO, P ;
SUNDGREN, JE .
JOURNAL OF APPLIED PHYSICS, 1986, 60 (03) :1161-1168
[3]   ADHESION OF EVAPORATED TITANIUM TO POLYETHYLENE - EFFECTS OF ION-BOMBARDMENT PRETREATMENT [J].
BODO, P ;
SUNDGREN, JE .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (04) :1498-1502
[4]  
BODO P, 1986, SURF INTERFACE ANAL, V9, P437
[5]   TITANIUM DEPOSITION ONTO ION-BOMBARDED AND PLASMA-TREATED POLYDIMETHYLSILOXANE - SURFACE MODIFICATION, INTERFACE AND ADHESION [J].
BODO, P ;
SUNDGREN, JE .
THIN SOLID FILMS, 1986, 136 (01) :147-159
[6]  
BUCHWALTER PL, 1984, POLYIMIDES SYNTHESIS, V1, P537
[7]   COPPER-POLYVINYL ALCOHOL INTERFACE - STUDY WITH XPS [J].
BURKSTRAND, JM .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02) :363-365
[8]   FORMATION OF METAL-OXYGEN-POLYMER COMPLEXES ON POLYSTYRENE WITH NICKEL AND CHROMIUM [J].
BURKSTRAND, JM .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (04) :1072-1074
[9]  
CHOU NJ, 1984, J VAC SCI TECHNOL A, V2, P751, DOI 10.1116/1.572564
[10]   AN XPS AND TEM STUDY OF INTRINSIC ADHESION BETWEEN POLYIMIDE AND CR FILMS [J].
CHOU, NJ ;
DONG, DW ;
KIM, J ;
LIU, AC .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (10) :2335-2340