IR SPECTROSCOPY AND STRUCTURE OF RF MAGNETRON SPUTTERED A-SIC-H FILMS

被引：55

作者：

RUBEL, H

SCHRODER, B

FUHS, W

KRAUSKOPF, J

RUPP, T

BETHGE, K

机构：

来源：

PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS | 1987年 / 139卷 / 01期

关键词：

D O I：

10.1002/pssb.2221390111

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

引用

页码：131 / 143

页数：13

共 53 条

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