100 GHZ WAFER PROBES BASED ON PHOTOCONDUCTIVE SAMPLING

被引：8

作者：

FEUER, MD ^{[1
]}

SHUNK, SC ^{[1
]}

SMITH, PR ^{[1
]}

NUSS, MC ^{[1
]}

LAW, HH ^{[1
]}

机构：

[1] AT&T BELL LABS,MURRAY HILL,NJ 07974

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 1993年 / 5卷 / 03期

关键词：

D O I：

10.1109/68.205639

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have fabricated optoelectronic wafer probes with both free-space and fiber-optic input, and adapted microwave error correction techniques to enable calibrated measurements with the new probes. Photoconductive switches on the probe tip define stimulus pulses and sampling intervals, and signals are transferred to and from the wafer under test by coplanar waveguide transmission lines and plated contact bumps. Vector error correction eliminates the need for time gating to separate the input and reflected pulses, while enhancing accuracy. Since probe flexure under contact significantly disturbs alignment of free-space beams, fiber-optic input yields the most precise measurements. We demonstrate calibrated, on-wafer, measurements of the complex reflection coefficient S11 at frequencies up to 100 GHz.

引用

页码：361 / 364

页数：4

共 9 条

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