INTERFACIAL SHARPNESSES AND THICKNESSES OF LAYERS IN A GAAS0.2P0.8/GAP STRAINED-LAYER SUPERLATTICE MEASURED BY AUGER SPUTTER PROFILING

被引：2

作者：

CHAMBERLAIN, MB

WALLACE, WO

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 06期

关键词：

D O I：

10.1116/1.572841

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2596 / 2599

页数：4

共 16 条

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