VACUUM-SYSTEMS FOR MICROELECTRONICS

被引:7
作者
OHANLON, JF
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1983年 / 1卷 / 02期
关键词
D O I
10.1116/1.572078
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:228 / 232
页数:5
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