学术探索
学术期刊
新闻热点
数据分析
智能评审

VACUUM-SYSTEMS FOR MICROELECTRONICS

被引：7
作者：
OHANLON, JF
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1983年 / 1卷 / 02期
关键词：
D O I：
10.1116/1.572078
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：228 / 232
页数：5
相关论文
共 15 条
[11]  
OHANLON JF, 1981, SOLID STATE TECHNOL, V24, P86
[12]  
SANTELER DJ, 1966, NASA SP105
[13]   A CRYOSORPTION PUMPED RAPID CYCLE UHV SYSTEM [J].
VISSER, J ;
SCHEER, JJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (01) :122-123
[14]   GROWTH, SYNERGISM, AND ADVOCACY - THE AMERICAN VACUUM SOCIETY IN 1980 [J].
VOSSEN, JL .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 18 (02) :135-141
[15]   DESIGN AND OPERATIONAL CHARACTERISTICS OF THE CRYOPUMP HIGH-VACUUM SYSTEM FOR THE 25000-1 TARGET CHAMBER OF THE HELIOS LASER FACILITY [J].
WILSON, NG ;
WATTS, KN .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (01) :270-273
12