DEPOSITION OF POLYMER-FILMS IN LOW-PRESSURE REACTIVE PLASMAS

被引：16

作者：

BIEDERMAN, H

机构：

来源：

THIN SOLID FILMS | 1981年 / 86卷 / 2-3期

关键词：

D O I：

10.1016/0040-6090(81)90282-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：125 / 135

页数：11

相关论文

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