HYDROGEN BALMER ALPHA LINE-SHAPES FOR HYDROGEN-ARGON MIXTURES IN A LOW-PRESSURE RF DISCHARGE

被引：66

作者：

DJUROVIC, S

ROBERTS, JR

机构：

[1] National Institute of Standards and Technology, Gaithersburg

来源：

JOURNAL OF APPLIED PHYSICS | 1993年 / 74卷 / 11期

关键词：

D O I：

10.1063/1.355117

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The spectral and spatial profiles of atomic hydrogen emission (the Balmer lines H(alpha) and H(beta)) from a low-pressure rf (13.56 MHz) discharge in H-2+Ar mixtures have been studied. The plasma emission was observed in a direction normal to the applied electric field. The H(alpha) profiles exhibit central narrow components and wide components which are due to Doppler broadening. Comparisons of the H(alpha) profiles in a pure hydrogen plasma with those in H-2+Ar mixtures show that collisions of molecular hydrogen ions and hydrogen atoms with argon atoms play a significant role in the production of the H(alpha) profile shapes.

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页码：6558 / 6565

页数：8

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