DOPPLER-BROADENED LINE-SHAPES OF ATOMIC-HYDROGEN IN A PARALLEL-PLATE RADIO-FREQUENCY DISCHARGE

被引：56

作者：

CAPPELLI, AL ^{[1
]}

GOTTSCHO, RA ^{[1
]}

MILLER, TA ^{[1
]}

机构：

[1] AT&T BELL LABS,MURRAY HILL,NJ 07974

来源：

PLASMA CHEMISTRY AND PLASMA PROCESSING | 1985年 / 5卷 / 04期

关键词：

D O I：

10.1007/BF00566007

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

页码：317 / 331

页数：15

共 40 条

[1]

Bell A. T., 1974, Techniques and applications of plasma chemistry, P1

[2] LINE-SHAPES OF ATOMIC-HYDROGEN IN HOLLOW-CATHODE DISCHARGES [J].

BENESCH, W ;

LI, E .

OPTICS LETTERS, 1984, 9 (08) :338-340

[3]

CHEN F, 1974, INTRO PLASMA PHYSICS

[4] OPTICAL-EMISSION SPECTROSCOPY OF REACTIVE PLASMAS - A METHOD FOR CORRELATING EMISSION INTENSITIES TO REACTIVE PARTICLE DENSITY [J].

COBURN, JW ;

CHEN, M .

JOURNAL OF APPLIED PHYSICS, 1980, 51 (06) :3134-3136

[5]

CROTHERS DSF, 1978, P PHILOS T ROY SOC, V292, P539

[6]

CURTIS BJ, 1980, SOLID STATE TECHNOL, V23, P129

[7]

d'Agostino R., 1984, Plasma Chemistry and Plasma Processing, V4, P165, DOI 10.1007/BF00566839

[8] MECHANISMS OF ETCHING AND POLYMERIZATION IN RADIOFREQUENCY DISCHARGES OF CF4-H2,CF4-C2F4,C2F6-H2,C3F8-H2 [J].

DAGOSTINO, R ;

CRAMAROSSA, F ;

COLAPRICO, V ;

DETTOLE, R .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (03) :1284-1288

[9] SPECTROSCOPIC DIAGNOSTICS OF CF4-O2 PLASMAS DURING SI AND SIO2 ETCHING PROCESSES [J].

DAGOSTINO, R ;

CRAMAROSSA, F ;

DEBENEDICTIS, S ;

FERRARO, G .

JOURNAL OF APPLIED PHYSICS, 1981, 52 (03) :1259-1265

[10]

DAGOSTINO R, 1981, PLASMA CHEM PLASMA P, V1, P365

← 1 2 3 4 →