SPECTROSCOPIC DIAGNOSTICS OF CF4-O2 PLASMAS DURING SI AND SIO2 ETCHING PROCESSES

被引：299

作者：

DAGOSTINO, R

CRAMAROSSA, F

DEBENEDICTIS, S

FERRARO, G

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1981年 / 52卷 / 03期

关键词：

D O I：

10.1063/1.329748

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：1259 / 1265

页数：7

相关论文

共 25 条

[1] ABE H, 1977, 3RD P INT S PLASM CH
[2] BOYD H, 1979, SOLID STATE TECHNOL, V22, P133
[3] MECHANISMS OF EXCITATION OF LUMINESCENCE IN NITROGEN GAS BY FAST ELECTRONS
BROCKLEHURST, B
DOWNING, FA
[J]. JOURNAL OF CHEMICAL PHYSICS, 1967, 46 (08) : 2976 - +
[4] B-X SYSTEM OF CF
CARROLL, PK
GRENNAN, TP
[J]. JOURNAL OF PHYSICS PART B ATOMIC AND MOLECULAR PHYSICS, 1970, 3 (06): : 865 - &
[5] COBURN JW, 1979, SOLID STATE TECHNOL, V22, P117
[6] OPTICAL-EMISSION SPECTROSCOPY OF REACTIVE PLASMAS - A METHOD FOR CORRELATING EMISSION INTENSITIES TO REACTIVE PARTICLE DENSITY
COBURN, JW
CHEN, M
[J]. JOURNAL OF APPLIED PHYSICS, 1980, 51 (06) : 3134 - 3136
[7] SPECTROSCOPIC DIAGNOSTICS OF RF DISCHARGES AT MODERATE PRESSURE AND CHEMICAL APPLICATIONS .1. PURE NITROGEN
CRAMAROSSA, F
FERRARO, G
MOLINARI, E
[J]. JOURNAL OF QUANTITATIVE SPECTROSCOPY & RADIATIVE TRANSFER, 1974, 14 (06) : 419 - 436
[8] PLASMA-ETCHING OF SI AND SIO2 IN SF6-O2 MIXTURES
DAGOSTINO, R
FLAMM, DL
[J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (01) : 162 - 167
[9] DONNELLY VM, 1980, 157TH P M EL SOC ST
[10] FLAMM DL, 1979, SOLID STATE TECHNOL, V22, P109