GAS IDENTIFICATION BY A SINGLE GAS SENSOR USING POROUS SILICON AS THE SENSITIVE MATERIAL

被引：38

作者：

MOTOHASHI, A ^{[1
]}

KAWAKAMI, M ^{[1
]}

AOYAGI, H ^{[1
]}

KINOSHITA, A ^{[1
]}

SATOU, A ^{[1
]}

机构：

[1] FUJIKURA LTD,DIV RES & DEV,KOTO KU,TOKYO 135,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1995年 / 34卷 / 10期

关键词：

GAS MOLECULAR RADIUS; DIELECTRIC LOSS ANGLE; POROUS SILICON; PORE RADIUS; GAS IDENTIFICATION;

D O I：

10.1143/JJAP.34.5840

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The peak frequency of the dielectric loss angle of gas molecules adsorbed in a porous silicon gas sensor having a 2.4 nm pore radius is found to vary inversely proportional to the third power of the gas molecular radius. Peak frequency is extremely sensitive to the pore radius, becoming about one order of magnitude higher for a pore radius of 1 nm. The temperature dependence of the peak frequency in the range of 0 to 25 degrees C mas also determined.

引用

页码：5840 / 5843

页数：4

共 14 条

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