DEGRADATION OF NATIVE OXIDE PASSIVATED SILICON PHOTODIODES BY REPEATED OXIDE BIAS

被引：7

作者：

VERDEBOUT, J ^{[1
]}

BOOKER, RL ^{[1
]}

机构：

[1] NBS,WASHINGTON,DC 20234

来源：

关键词：

D O I：

10.1063/1.333088

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：406 / 412

页数：7

共 6 条

[1]

COLCLASER RA, 1980, MICROELECTRONICS PRO, P127

GEIST, J .

APPLIED OPTICS, 1979, 18 (06) :760-762

GEIST, J ;

ZALEWSKI, EF ;

SCHAEFER, AR .

APPLIED OPTICS, 1980, 19 (22) :3795-3799

[4]

LINDMAYER J, 1973, COMSAT TECH REV, V3, P10

[5] SILICON PHOTO-DIODE ABSOLUTE SPECTRAL RESPONSE SELF-CALIBRATION [J].

ZALEWSKI, EF ;

GEIST, J .

APPLIED OPTICS, 1980, 19 (08) :1214-1216

[6]

ZALEWSKI EF, 1982, 10TH P INT S TECHN C, P127