SEMICONDUCTOR PROFILING USING AN OPTICAL PROBE

被引：41

作者：

LILE, DL ^{[1
]}

DAVIS, NM ^{[1
]}

机构：

[1] USN,ELECTR LAB CTR,SAN DIEGO,CA 92132

来源：

关键词：

D O I：

10.1016/0038-1101(75)90142-2

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：699 / &

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[4]

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[8]

LILE DL, 1972, SURFACE SCI, V32, P149

[9]

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[10]

Moss T.S., 1955, J ELECTRON CONTR, V1, P126, DOI 10.1080/00207215508961396