THERMALLY DEVELOPABLE, POSITIVE RESIST SYSTEMS WITH HIGH-SENSITIVITY

[1] POLYMERIZATION OF AROMATIC ALDEHYDES .2. CATIONIC CYCLOPOLYMERIZATION OF PHTHALALDEHYDE [J]. JOURNAL OF POLYMER SCIENCE PART A-1-POLYMER CHEMISTRY, 1969, 7 (2PA1): : 497 - &

[2] Coopmans F., 1986, Proceedings of the SPIE - The International Society for Optical Engineering, V631, P34, DOI 10.1117/12.963623

[3] PHOTOSENSITIZED CATIONIC POLYMERIZATIONS USING DIALKYLPHENACYLSULFONIUM AND DIALKYL(4-HYDROXYPHENYL)SULFONIUM SALT PHOTOINITIATORS [J]. MACROMOLECULES, 1981, 14 (05) : 1141 - 1147

[4] DYE-SENSITIZED PHOTOINITIATED CATIONIC POLYMERIZATION [J]. JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 1978, 16 (10) : 2441 - 2451

[5] DYE-SENSITIZED PHOTOINITIATED CATIONIC POLYMERIZATION - SYSTEM - PERYLENE-TRIARYLSULFONIUM SALTS [J]. JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 1979, 17 (04) : 1059 - 1065

[6] NEW PREPARATION OF TRIARYLSULFONIUM AND TRIARYLSELENONIUM SALTS VIA COPPER(II)-CATALYZED ARYLATION OF SULFIDES AND SELENIDES WITH DIARYLIODONIUM SALTS [J]. JOURNAL OF ORGANIC CHEMISTRY, 1978, 43 (15) : 3055 - 3058

[7] FRECHET JMJ, 1986, J IMAGING SCI, V30, P59

[8] A BREAKTHROUGH TO THE PLASMA DEPOSITED DRY-DEVELOPABLE E-BEAM RESIST [J]. POLYMER ENGINEERING AND SCIENCE, 1983, 23 (18) : 1043 - 1046

[9] ALL DRY LITHOGRAPHY PROCESSES AND MECHANISTIC STUDIES WITH POLY(METHACRYLONITRILE) AND RELATED POLYMERS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1981, 128 (05) : 1065 - 1071

[10] HIRAOKA H, 1984, ACS SYM SER, V242, P55

[1] POLYMERIZATION OF AROMATIC ALDEHYDES .2. CATIONIC CYCLOPOLYMERIZATION OF PHTHALALDEHYDE [J]. JOURNAL OF POLYMER SCIENCE PART A-1-POLYMER CHEMISTRY, 1969, 7 (2PA1): : 497 - &

[2] Coopmans F., 1986, Proceedings of the SPIE - The International Society for Optical Engineering, V631, P34, DOI 10.1117/12.963623

[3] PHOTOSENSITIZED CATIONIC POLYMERIZATIONS USING DIALKYLPHENACYLSULFONIUM AND DIALKYL(4-HYDROXYPHENYL)SULFONIUM SALT PHOTOINITIATORS [J]. MACROMOLECULES, 1981, 14 (05) : 1141 - 1147

[4] DYE-SENSITIZED PHOTOINITIATED CATIONIC POLYMERIZATION [J]. JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 1978, 16 (10) : 2441 - 2451

[5] DYE-SENSITIZED PHOTOINITIATED CATIONIC POLYMERIZATION - SYSTEM - PERYLENE-TRIARYLSULFONIUM SALTS [J]. JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 1979, 17 (04) : 1059 - 1065

[6] NEW PREPARATION OF TRIARYLSULFONIUM AND TRIARYLSELENONIUM SALTS VIA COPPER(II)-CATALYZED ARYLATION OF SULFIDES AND SELENIDES WITH DIARYLIODONIUM SALTS [J]. JOURNAL OF ORGANIC CHEMISTRY, 1978, 43 (15) : 3055 - 3058

[7] FRECHET JMJ, 1986, J IMAGING SCI, V30, P59

[8] A BREAKTHROUGH TO THE PLASMA DEPOSITED DRY-DEVELOPABLE E-BEAM RESIST [J]. POLYMER ENGINEERING AND SCIENCE, 1983, 23 (18) : 1043 - 1046

[9] ALL DRY LITHOGRAPHY PROCESSES AND MECHANISTIC STUDIES WITH POLY(METHACRYLONITRILE) AND RELATED POLYMERS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1981, 128 (05) : 1065 - 1071

[10] HIRAOKA H, 1984, ACS SYM SER, V242, P55