INTERFACIAL REACTIONS ON ANNEALING MOLYBDENUM-SILICON MULTILAYERS

被引：141

作者：

HOLLOWAY, K ^{[1
]}

DO, KB ^{[1
]}

SINCLAIR, R ^{[1
]}

机构：

[1] STANFORD UNIV,DEPT MAT SCI & ENGN,STANFORD,CA 94305

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 65卷 / 02期

关键词：

D O I：

10.1063/1.343425

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：474 / 480

页数：7

共 36 条

[1]

Aronsson B., 1965, BORIDES SILICIDES PH

[2] FORMATION OF SILICIDES IN MO-W BILAYER FILMS ON SI SUBSTRATES - MARKER EXPERIMENT [J].

BAGLIN, J ;

DEMPSEY, J ;

HAMMER, W ;

DHEURLE, F ;

PETERSSON, S ;

SERRANO, C .

JOURNAL OF ELECTRONIC MATERIALS, 1979, 8 (05) :641-661

[3]

BARBEE TW, 1980, SYNTHESIS PROPERTIES, P93

[4] A KINETIC-MODEL FOR SOLID-STATE SILICIDE NUCLEATION [J].

BENE, RW .

JOURNAL OF APPLIED PHYSICS, 1987, 61 (05) :1826-1833

[5] METASTABLE PHASE FORMATION IN TITANIUM-SILICON THIN-FILMS [J].

BEYERS, R ;

SINCLAIR, R .

JOURNAL OF APPLIED PHYSICS, 1985, 57 (12) :5240-5245

[6] FORMATION KINETICS OF MOSI2 INDUCED BY CW SCANNED LASER-BEAM [J].

BOMCHIL, G ;

BENSAHEL, D ;

GOLANSKI, A ;

FERRIEU, F ;

AUVERT, G ;

PERIO, A ;

PFISTER, JC .

APPLIED PHYSICS LETTERS, 1982, 41 (01) :46-48

[7] HEAT OF MIXING OF LIQUID ALLOYS .2. [J].

BOOM, R ;

DEBOER, FR ;

MIEDEMA, AR .

JOURNAL OF THE LESS-COMMON METALS, 1976, 46 (02) :271-284

[8]

Brandes E.A, 1983, SMITHELLS LIGHT META

[9] THE PREPARATION OF CROSS-SECTION SPECIMENS FOR TRANSMISSION ELECTRON-MICROSCOPY [J].

BRAVMAN, JC ;

SINCLAIR, R .

JOURNAL OF ELECTRON MICROSCOPY TECHNIQUE, 1984, 1 (01) :53-61

[10]

BUIVARC A, 1978, J APPL PHYS, V49, P233

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