Sol-gel and MOD processing of layered perovskite and SrTiO3 films

被引：13

作者：

Klee, M

Mackens, U

机构：

[1] Philips GmbH Forschungslaboratorien, 52066 Aachen

来源：

MICROELECTRONIC ENGINEERING | 1995年 / 29卷 / 1-4期

关键词：

Film morphology - Layered perovskites - Metallorganic decomposition - Strontium titanate;

D O I：

10.1016/0167-9317(95)00141-7

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Sol-gel and MOD processes have been developed to deposit SrTiO3 and layered perovskite films e.g. SrBi2Ta2O9 and SrBi2NbTaO9 on top of Si(100) substrates with Ti/Pt electrodes. Their processing and film morphology have been studied. The ferroelectric properties and the endurance of the layered perovskites e.g. SrBi2Ta2O9 are shown.

引用

页码：185 / 188

页数：4

共 7 条

[1] PREPARATION AND FERROELECTRIC PROPERTIES OF SRBI2TA2O9 THIN-FILMS
AMANUMA, K
HASE, T
MIYASAKA, Y
[J]. APPLIED PHYSICS LETTERS, 1995, 66 (02) : 221 - 223
[2] HUFFMAN M, 1994, IN PRESS P MATERIALS
[3] JONES RE, 1995, 7TH P INT S INT FERR
[4] KLEE M, 1993, PHILIPS J RES, V47, P263
[5] Klee M., 1995, Science and Technology of Electroceramic Thin Films. Proceedings of the NATO Advanced Research Workshop, P99
[6] KLEE M, 1992, FERROELECTRICS, V133, P92
[7] SMOELENSKII GA, 1961, SOV PHYS-SOLID STATE, V3, P651

← 1 →