PARTITIONING OF ION-INDUCED SURFACE AND BULK DISPLACEMENTS

[1] LOW-TEMPERATURE EPITAXIAL-GROWTH OF SI AND GE AND FABRICATION OF ISOTOPIC HETEROSTRUCTURES BY DIRECT ION-BEAM DEPOSITION [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 : 975 - 982

[2] APPLETON BR, COMMUNICATION

[3] BANBURY PC, 1968, RAD EFFECTS SEMICOND, P280

[4] AN OPTIMIZED INSITU ARGON SPUTTER CLEANING PROCESS FOR DEVICE QUALITY LOW-TEMPERATURE (T LESS-THAN-OR-EQUAL-TO 800-DEGREES-C) EPITAXIAL SILICON - BIPOLAR-TRANSISTOR AND PN JUNCTION CHARACTERIZATION [J]. JOURNAL OF APPLIED PHYSICS, 1987, 62 (10) : 4255 - 4268

[5] ORIENTATION AND TEMPERATURE DEPENDENCE OF ELECTRON DAMAGE IN N-TYPE GERMANIUN [J]. PHILOSOPHICAL MAGAZINE, 1969, 19 (158): : 357 - &

[6] CORBETT JW, 1966, ELECTRON RAD DAMAG S, V7

[7] EGGEN DT, UNPUB

[8] MONTE-CARLO CALCULATIONS OF LIGHT-ION SPUTTERING AS A FUNCTION OF THE INCIDENT ANGLE [J]. JOURNAL OF NUCLEAR MATERIALS, 1980, 93-4 (OCT) : 664 - 669

[9] RAINBOW SCATTERING OF LOW ENERGETIC ALKALIS FROM AG(111) [J]. SURFACE SCIENCE, 1988, 201 (03) : 573 - 602

[10] Itoh T., 1989, ION BEAM ASSISTED FI

[1] LOW-TEMPERATURE EPITAXIAL-GROWTH OF SI AND GE AND FABRICATION OF ISOTOPIC HETEROSTRUCTURES BY DIRECT ION-BEAM DEPOSITION [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 : 975 - 982

[2] APPLETON BR, COMMUNICATION

[3] BANBURY PC, 1968, RAD EFFECTS SEMICOND, P280

[4] AN OPTIMIZED INSITU ARGON SPUTTER CLEANING PROCESS FOR DEVICE QUALITY LOW-TEMPERATURE (T LESS-THAN-OR-EQUAL-TO 800-DEGREES-C) EPITAXIAL SILICON - BIPOLAR-TRANSISTOR AND PN JUNCTION CHARACTERIZATION [J]. JOURNAL OF APPLIED PHYSICS, 1987, 62 (10) : 4255 - 4268

[5] ORIENTATION AND TEMPERATURE DEPENDENCE OF ELECTRON DAMAGE IN N-TYPE GERMANIUN [J]. PHILOSOPHICAL MAGAZINE, 1969, 19 (158): : 357 - &

[6] CORBETT JW, 1966, ELECTRON RAD DAMAG S, V7

[7] EGGEN DT, UNPUB

[8] MONTE-CARLO CALCULATIONS OF LIGHT-ION SPUTTERING AS A FUNCTION OF THE INCIDENT ANGLE [J]. JOURNAL OF NUCLEAR MATERIALS, 1980, 93-4 (OCT) : 664 - 669

[9] RAINBOW SCATTERING OF LOW ENERGETIC ALKALIS FROM AG(111) [J]. SURFACE SCIENCE, 1988, 201 (03) : 573 - 602

[10] Itoh T., 1989, ION BEAM ASSISTED FI