MONTE-CARLO CALCULATIONS OF LIGHT-ION SPUTTERING AS A FUNCTION OF THE INCIDENT ANGLE

[1] Andersen HH., 1977, HYDROGEN STOPPING PO

[2] SPUTTERING YIELDS FOR LIGHT-IONS AS A FUNCTION OF ANGLE OF INCIDENCE [J]. APPLIED PHYSICS, 1979, 19 (04): : 421 - 426

[3] SPUTTERING MECHANISM FOR LOW-ENERGY LIGHT-IONS [J]. APPLIED PHYSICS, 1979, 18 (04): : 391 - 398

[4] Betz G., 1971, International Journal of Mass Spectrometry and Ion Physics, V6, P451, DOI 10.1016/0020-7381(71)85022-2

[5] BIERSACK JP, 1978, J NUCL MATER, V76-7, P640, DOI 10.1016/0022-3115(78)90228-3

[6] BIERSACK JP, UNPUBLISHED

[7] DUSHIKOV II, 1962, SOV PHYS-TECH PHYS, V6, P735

[8] ECKER KH, 1977, 7TH INT C AT COLL SO

[9] COMPUTER-SIMULATION OF THE BACKSCATTERING AND IMPLANTATION OF HYDROGEN AND HELIUM [J]. JOURNAL OF APPLIED PHYSICS, 1980, 51 (02) : 1194 - 1200

[10] FIRSOV OB, 1958, SOV PHYS JETP-USSR, V6, P534

[1] Andersen HH., 1977, HYDROGEN STOPPING PO

[2] SPUTTERING YIELDS FOR LIGHT-IONS AS A FUNCTION OF ANGLE OF INCIDENCE [J]. APPLIED PHYSICS, 1979, 19 (04): : 421 - 426

[3] SPUTTERING MECHANISM FOR LOW-ENERGY LIGHT-IONS [J]. APPLIED PHYSICS, 1979, 18 (04): : 391 - 398

[4] Betz G., 1971, International Journal of Mass Spectrometry and Ion Physics, V6, P451, DOI 10.1016/0020-7381(71)85022-2

[5] BIERSACK JP, 1978, J NUCL MATER, V76-7, P640, DOI 10.1016/0022-3115(78)90228-3

[6] BIERSACK JP, UNPUBLISHED

[7] DUSHIKOV II, 1962, SOV PHYS-TECH PHYS, V6, P735

[8] ECKER KH, 1977, 7TH INT C AT COLL SO

[9] COMPUTER-SIMULATION OF THE BACKSCATTERING AND IMPLANTATION OF HYDROGEN AND HELIUM [J]. JOURNAL OF APPLIED PHYSICS, 1980, 51 (02) : 1194 - 1200

[10] FIRSOV OB, 1958, SOV PHYS JETP-USSR, V6, P534