ANNEALING OF UNDOPED INP AND THE EVALUATION BY PHOTOLUMINESCENCE

被引:21
作者
INOUE, T [1 ]
SHIMAKURA, H [1 ]
KAINOSHO, K [1 ]
HIRANO, R [1 ]
ODA, O [1 ]
机构
[1] NIPPON MIN CO LTD,DEPT SEMICOND MAT,TODA,SAITAMA 335,JAPAN
关键词
D O I
10.1149/1.2086649
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
Undoped InP single crystals grown by the LEC technique have been annealed at temperatures between 520°–820°C for 5h and their electrical properties and the photoluminescence spectra have been evaluated. It was found that the carrier concentration can be decreased up to 3 × 1014 cm−3 by annealing at 620°C and the photoluminescence spectra are largely changed by annealing. When the annealing temperature is increased to higher than 720°C, the free exciton peak appears very prominently and many peaks appear at the longer wavelength region between 900 and 980 nm. © 1990, The Electrochemical Society, Inc. All rights reserved.
引用
收藏
页码:1283 / 1288
页数:6
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