DETERMINATION OF COMPOSITION AND THICKNESS OF TINX OY FILMS ON SILICON BY COMBINED X-RAY AND NUCLEAR MICROANALYSIS

被引：5

作者：

ARMIGLIATO, A

GARULLI, A

ROSA, R

BERTI, M

DRIGO, AV

DESALVO, A

机构：

[1] UNIV PADUA,IST FIS,I-35100 PADUA,ITALY

[2] CNR,UNITA GNSM,I-35100 PADUA,ITALY

[3] UNIV BOLOGNA,FAC INGN,IST CHIM,I-40126 BOLOGNA,ITALY

来源：

X-RAY SPECTROMETRY | 1983年 / 12卷 / 01期

关键词：

D O I：

10.1002/xrs.1300120109

中图分类号：

O433 [光谱学];

学科分类号：

0703 ; 070302 ;

摘要：

引用

页码：38 / 41

页数：4

共 17 条

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