CHARACTERIZATION OF TITANIUM NITRIDE FILMS DEPOSITED ONTO SILICON

被引：18

作者：

ARMIGLIATO, A ^{[1
]}

CELOTTI, G ^{[1
]}

GARULLI, A ^{[1
]}

GUERRI, S ^{[1
]}

OSTOJA, P ^{[1
]}

ROSA, R ^{[1
]}

MARTINELLI, G ^{[1
]}

机构：

[1] UNIV FERRARA,IST FIS,I-44100 FERRARA,ITALY

来源：

THIN SOLID FILMS | 1982年 / 92卷 / 04期

关键词：

D O I：

10.1016/0040-6090(82)90158-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：341 / 346

页数：6

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