STUDY OF ION-IMPLANTATION DAMAGE IN GAAS-BE AND INP-BE USING RAMAN-SCATTERING

被引:80
作者
RAO, CSR [1 ]
SUNDARAM, S [1 ]
SCHMIDT, RL [1 ]
COMAS, J [1 ]
机构
[1] USN,RES LAB,WASHINGTON,DC 20375
关键词
D O I
10.1063/1.332815
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:1808 / 1815
页数:8
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