DEPOSITION OF OPTICAL THIN-FILMS BY ION-BEAM SPUTTERING

被引：22

作者：

VARASI, M

MISIANO, C

LASAPONARA, L

机构：

来源：

THIN SOLID FILMS | 1984年 / 117卷 / 03期

关键词：

D O I：

10.1016/0040-6090(84)90284-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：163 / 172

页数：10

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