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TEMPERATURE-DEPENDENCE OF THE INTERNAL MECHANICAL STRESSES IN THE SI-SIO2 SYSTEM
被引:15
作者
:
JAROSZ, M
论文数:
0
引用数:
0
h-index:
0
JAROSZ, M
KOCSANYI, L
论文数:
0
引用数:
0
h-index:
0
KOCSANYI, L
GIBER, J
论文数:
0
引用数:
0
h-index:
0
GIBER, J
机构
:
来源
:
APPLIED SURFACE SCIENCE
|
1982年
/ 14卷
/ 01期
关键词
:
D O I
:
10.1016/0378-5963(82)90046-0
中图分类号
:
O64 [物理化学(理论化学)、化学物理学];
学科分类号
:
070304 ;
081704 ;
摘要
:
引用
收藏
页码:122 / 127
页数:6
相关论文
共 16 条
[11]
KORN GA, 1963, MATH HDB SCI ENG
[12]
THERMAL STRESS AND PLASTIC DEFORMATION OF THIN SILICON SLICES
MORIZANE, K
论文数:
0
引用数:
0
h-index:
0
机构:
Texas Instruments, Incorporated, Dallas, TX 75222
MORIZANE, K
GLEIM, PS
论文数:
0
引用数:
0
h-index:
0
机构:
Texas Instruments, Incorporated, Dallas, TX 75222
GLEIM, PS
[J].
JOURNAL OF APPLIED PHYSICS,
1969,
40
(10)
: 4104
-
&
[13]
DYNAMIC MICROMECHANICS ON SILICON - TECHNIQUES AND DEVICES
PETERSEN, KE
论文数:
0
引用数:
0
h-index:
0
PETERSEN, KE
[J].
IEEE TRANSACTIONS ON ELECTRON DEVICES,
1978,
25
(10)
: 1241
-
1250
[14]
THERMAL-STRESSES AND CRACKING RESISTANCE OF DIELECTRIC FILMS (SIN, SI3N4, AND SIO2) ON SI SUBSTRATES
SINHA, AK
论文数:
0
引用数:
0
h-index:
0
SINHA, AK
LEVINSTEIN, HJ
论文数:
0
引用数:
0
h-index:
0
LEVINSTEIN, HJ
SMITH, TE
论文数:
0
引用数:
0
h-index:
0
SMITH, TE
[J].
JOURNAL OF APPLIED PHYSICS,
1978,
49
(04)
: 2423
-
2426
[15]
TEMPERATURE DEPENDENCE OF ELASTIC CONSTANTS OF VITREOUS SILICA
SPINNER, S
论文数:
0
引用数:
0
h-index:
0
SPINNER, S
[J].
JOURNAL OF THE AMERICAN CERAMIC SOCIETY,
1962,
45
(08)
: 394
-
397
[16]
WILCOCK JD, 1967, THESIS IMPERIAL COLL
←
1
2
→
共 16 条
[11]
KORN GA, 1963, MATH HDB SCI ENG
[12]
THERMAL STRESS AND PLASTIC DEFORMATION OF THIN SILICON SLICES
MORIZANE, K
论文数:
0
引用数:
0
h-index:
0
机构:
Texas Instruments, Incorporated, Dallas, TX 75222
MORIZANE, K
GLEIM, PS
论文数:
0
引用数:
0
h-index:
0
机构:
Texas Instruments, Incorporated, Dallas, TX 75222
GLEIM, PS
[J].
JOURNAL OF APPLIED PHYSICS,
1969,
40
(10)
: 4104
-
&
[13]
DYNAMIC MICROMECHANICS ON SILICON - TECHNIQUES AND DEVICES
PETERSEN, KE
论文数:
0
引用数:
0
h-index:
0
PETERSEN, KE
[J].
IEEE TRANSACTIONS ON ELECTRON DEVICES,
1978,
25
(10)
: 1241
-
1250
[14]
THERMAL-STRESSES AND CRACKING RESISTANCE OF DIELECTRIC FILMS (SIN, SI3N4, AND SIO2) ON SI SUBSTRATES
SINHA, AK
论文数:
0
引用数:
0
h-index:
0
SINHA, AK
LEVINSTEIN, HJ
论文数:
0
引用数:
0
h-index:
0
LEVINSTEIN, HJ
SMITH, TE
论文数:
0
引用数:
0
h-index:
0
SMITH, TE
[J].
JOURNAL OF APPLIED PHYSICS,
1978,
49
(04)
: 2423
-
2426
[15]
TEMPERATURE DEPENDENCE OF ELASTIC CONSTANTS OF VITREOUS SILICA
SPINNER, S
论文数:
0
引用数:
0
h-index:
0
SPINNER, S
[J].
JOURNAL OF THE AMERICAN CERAMIC SOCIETY,
1962,
45
(08)
: 394
-
397
[16]
WILCOCK JD, 1967, THESIS IMPERIAL COLL
←
1
2
→