共 13 条
[1]
ACTIVATED REACTIVE EVAPORATION PROCESS FOR HIGH RATE DEPOSITION OF COMPOUNDS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1972, 9 (06)
:1385-&
[3]
INAGAWA K, 1982, 7TH P INT C VAC MET, P118
[4]
INAGAWA K, UNPUB THIN SOLID FIL
[5]
IMPURITY EVOLUTION IN A BEAM-HEATED TOKAMAK
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS,
1982, 21 (02)
:331-336
[7]
MURAKAMI Y, 1983, 9TH P INT VAC C 5TH, P538
[10]
STORM EK, 1967, REFRACTORY CARBIDES, pCH1