TITANIUM CARBIDE COATING ON INCONEL-625 LINER FOR JT-60 BY HCD-ARE

被引:8
作者
INAGAWA, K
WATANABE, K
TANAKA, I
ITOH, A
ABE, T
MURAKAMI, Y
MIZOGUCHI, T
ITOU, Y
机构
[1] JAPAN ATOM ENERGY RES INST,NAKA,IBARAKI 31102,JAPAN
[2] HITACHI LTD,HITACHI WORKS,HITACHI,IBARAKI 317,JAPAN
关键词
D O I
10.1016/0022-3115(84)90486-0
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
13
引用
收藏
页码:925 / 928
页数:4
相关论文
共 13 条
[1]   ACTIVATED REACTIVE EVAPORATION PROCESS FOR HIGH RATE DEPOSITION OF COMPOUNDS [J].
BUNSHAH, RF ;
RAGHURAM, AC .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (06) :1385-&
[2]   ASPECTS OF ESCA SPECTRA OF SINGLE-CRYSTALS AND THIN-FILMS OF TITANIUM CARBIDE [J].
IHARA, H ;
KUMASHIRO, Y ;
ITOH, A ;
MAEDA, K .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1973, 12 (09) :1462-1463
[3]  
INAGAWA K, 1982, 7TH P INT C VAC MET, P118
[4]  
INAGAWA K, UNPUB THIN SOLID FIL
[5]   IMPURITY EVOLUTION IN A BEAM-HEATED TOKAMAK [J].
KISHIMOTO, H ;
TANI, K ;
NAKAMURA, H .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1982, 21 (02) :331-336
[6]   FORMATION OF THICK TITANIUM CARBIDE FILMS BY HOLLOW-CATHODE DISCHARGE REACTIVE DEPOSITION PROCESS [J].
KOMIYA, S ;
UMEZU, N ;
NARUSAWA, T .
THIN SOLID FILMS, 1978, 54 (01) :51-60
[7]  
MURAKAMI Y, 1983, 9TH P INT VAC C 5TH, P538
[8]   THERMAL-SHOCK TESTING OF LOW-Z COATINGS FOR JT-60 [J].
NAKAMURA, K ;
YAMADA, R ;
SAIDOH, M ;
MURAKAMI, Y .
JOURNAL OF NUCLEAR MATERIALS, 1982, 111 (NOV-) :852-855
[9]   PROPERTIES OF TIXC1-X FILMS COATED ON MOLYBDENUM BY MAGNETRON SPUTTERING [J].
SHIKAMA, T ;
SHINNO, H ;
FUKUTOMI, M ;
FUJITSUKA, M ;
KITAJIMA, M ;
OKADA, M .
THIN SOLID FILMS, 1983, 101 (03) :233-242
[10]  
STORM EK, 1967, REFRACTORY CARBIDES, pCH1