MULTILAYER ANALYSIS OF ION-IMPLANTED GAAS USING SPECTROSCOPIC ELLIPSOMETRY

被引：26

作者：

ERMAN, M

THEETEN, JB

机构：

来源：

SURFACE AND INTERFACE ANALYSIS | 1982年 / 4卷 / 03期

关键词：

D O I：

10.1002/sia.740040305

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

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页码：98 / 108

页数：11

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共 14 条

[1] OPTICAL-PROPERTIES OF GAAS AND ITS ELECTROCHEMICALLY GROWN ANODIC OXIDE FROM 1.5 TO 6.0 EV
ASPNES, DE
SCHWARTZ, GP
GUALTIERI, GJ
STUDNA, AA
SCHWARTZ, B
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1981, 128 (03) : 590 - 597
[2] HIGH PRECISION SCANNING ELLIPSOMETER
ASPNES, DE
STUDNA, AA
[J]. APPLIED OPTICS, 1975, 14 (01): : 220 - 228
[3] METHODS FOR DRIFT STABILIZATION AND PHOTOMULTIPLIER LINEARIZATION FOR PHOTOMETRIC ELLIPSOMETERS AND POLARIMETERS
ASPNES, DE
STUDNA, AA
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1978, 49 (03) : 291 - 297
[4] ASPNES DE, 1981, SPIE P, V276, P188
[5] ELECTROREFLECTANCE OF ION-IMPLANTED GAAS
BROWN, RL
SCHOONVELD, L
ABELS, LL
SUNDARAM, S
RACCAH, PM
[J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (04) : 2950 - 2957
[6] Calculation of various physics constants in heterogenous substances I Dielectricity constants and conductivity of mixed bodies from isotropic substances
Bruggeman, DAG
[J]. ANNALEN DER PHYSIK, 1935, 24 (07) : 636 - 664
[7] GIBBONS JF, 1975, PROJECTED RANGE STAT
[8] OPTICAL-PROPERTIES OF ULTRAFINE GOLD PARTICLES
GRANQVIST, CG
HUNDERI, O
[J]. PHYSICAL REVIEW B, 1977, 16 (08) : 3513 - 3534
[9] KEEPING ES, 1962, INTRO STATISTICAL IN, pCH12
[10] THEETEN JB, 1980, VIDE COUCHES MINCE S, V201, P1071