EFFECT OF CARRIER GAS ON STRUCTURE OF PLASMA POLYMERIZED TETRAFLUOROETHYLENE FILMS

被引：7

作者：

NAKANO, T

KASAMA, Y

OHKI, Y

YAHAGI, K

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1985年 / 24卷 / 01期

关键词：

D O I：

10.1143/JJAP.24.83

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：83 / 86

页数：4

共 10 条

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