EFFECT OF LASER-INDUCED DISSOCIATION DURING MEASUREMENTS OF HYDROGEN-ATOMS IN SILANE PLASMAS USING 2-PHOTON-EXCITED LASER-INDUCED FLUORESCENCE

被引：8

作者：

PARK, WZ

TANIGAWA, M

KAJIWARA, T

MURAOKA, K

MASUDA, M

OKADA, T

MAEDA, M

SUZUKI, A

MATSUDA, A

机构：

[1] ELECTROTECH LAB,TSUKUBA 305,JAPAN

[2] KYUSHU UNIV,FAC ENGN,DEPT ELECT ENGN,FUKUOKA 812,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1992年 / 31卷 / 9A期

关键词：

SILANE PLASMA; LASER-INDUCED DISSOCIATION; HYDROGEN ATOM; DENSITY DISTRIBUTION; 2-PHOTON EXCITATION; LYMAN BETA TRANSITION; AMORPHOUS SILICON;

D O I：

10.1143/JJAP.31.2917

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

During measurements of atomic hydrogen in a silane plasma using two-photon-excited laser-induced fluorescence, laser-induced dissociation of the gas was observed. This was investigated until conditions for the input laser fluence were determined where the effect was negligible. A measurement of the atomic hydrogen distribution was then performed within the limits of these conditions.

引用

页码：2917 / 2918

页数：2

共 6 条

[1] PARTICULATES IN ALUMINUM SPUTTERING DISCHARGES [J].