SPUTTERING OF INSULATORS DUE TO ELECTRONIC EXCITATION, BY FAST IONS AND ELECTRONS

被引:41
作者
JOHNSON, RE [1 ]
BROWN, WL [1 ]
机构
[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974
来源
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 209卷 / MAY期
关键词
D O I
10.1016/0167-5087(83)90840-2
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
34
引用
收藏
页码:469 / 476
页数:8
相关论文
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